Characterization Of Amorphous Carbon Films Based On Carbon, Nitrogen, and hydrogen*.
Efstathiadis, H., Akkerman, Z., Smith, F. W.Volume:
415
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-415-51
Date:
January, 1995
File:
PDF, 383 KB
english, 1995