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Characteristics of XeCl Excimer-Laser Annealed Insulator
Jang, Keun-Ho, Choi, Hong-Seok, Jun, Jae-Hong, Yoo, Jhun-Suk, Han, MinkooVolume:
420
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-420-105
Date:
January, 1996
File:
PDF, 632 KB
english, 1996