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Light-Induced Effects on Fluorinated Amorphous and Microcrystalline Silicon Films
Choi, Hong-Seok, Jang, Keun-Ho, Yoo, Jhun-Suk, Han, Min-KooVolume:
420
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-420-323
Date:
January, 1996
File:
PDF, 258 KB
english, 1996