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A-Si:H Films Deposited by Dc-Masd Technique at High Substrate Temperature
Golikova, O. A., Kuznetsov, A. N., Kudojarova, V. Kh., Kazanin, M. M., Ikosarev, A.Volume:
420
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-420-353
Date:
January, 1996
File:
PDF, 141 KB
english, 1996