Ohmic Contacts to n-Type 6H-SiC Without Post-Annealing

MRS Proceedings 1996 / 1 Vol. 423

Ohmic Contacts to n-Type 6H-SiC Without Post-Annealing

Teraji, Tokuyuki, Hara, Shiro, Okushi, Hideyo, Kajimura, Koji
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Volume:
423
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-423-149
Date:
January, 1996
File:
PDF, 908 KB
english, 1996
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