Effect Of Base Pressure In Sputter Deposition On...

MRS Proceedings 1996 / 1 Vol. 424

Effect Of Base Pressure In Sputter Deposition On Characteristics Of Indium Tin Oxide Thin Film

Lee, Byung Hak, Yi, Choong-Hoon, Kim, Lee Gon, Lee, Si-Hyun
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Volume:
424
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-424-335
Date:
January, 1996
File:
PDF, 282 KB
english, 1996
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