![](/img/cover-not-exists.png)
Comparison of TiN films produced by TDEAT (Ti[N(C2H5)2]4), TDMAT (Ti[N(CH3)2]4), and a new precursor TEMAT (Ti[N(CH3)C2H5]4)
Lee, J-G, Kim, J-H, Shin, H-K, Park, S-J, Yun, S-J, Kim, G-HVolume:
427
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-427-371
Date:
January, 1996
File:
PDF, 1.04 MB
english, 1996