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Synthesis and Characterization of Siof Thin Films Deposited by Ecrcvd for Ulsi Multilevel Interconnections
Lee, Seoghyeong, Park, Jong-WanVolume:
427
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-427-427
Date:
January, 1996
File:
PDF, 359 KB
english, 1996