Cobalt and Titanium Metallization of SiGeC for Shallow...

MRS Proceedings 1996 / 1 Vol. 427

Cobalt and Titanium Metallization of SiGeC for Shallow Contacts

Bair, A. E, Alford, T. L., Atzmon, Z., Marcus, S. D., Doller, D. C., Morton, R., Lau, S. S., Mayer, J. W.
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Volume:
427
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-427-529
Date:
January, 1996
File:
PDF, 283 KB
english, 1996
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