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Electromigration in Single-Crystal Aluminum Lines Pre-Damaged by Nanoindentation
Joo, Young-Chang, Baker, Shefford P., Knaufß, Michael P., Arzt, EduardVolume:
428
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-428-225
Date:
January, 1996
File:
PDF, 1.19 MB
english, 1996