Residual Gas Phase Contamination of Al-Cu Alloy Films and...

MRS Proceedings 1996 / 1 Vol. 428

Residual Gas Phase Contamination of Al-Cu Alloy Films and its Effect on Electromigration Behavior

Hashim, Imran, Raaijmakers, Ivo J., Adler, Glen, Sidhwa, Ardy, Chopra, Sudhir
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Volume:
428
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-428-285
Date:
January, 1996
File:
PDF, 1.50 MB
english, 1996
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