An Optical Approach to Evaluating the Effects of Chlorine on the Quality Of Si/SiO2 Interfaces
Sherry, Julia, Lowell, John, Hossain, Tim, Debusk, DamonVolume:
428
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-428-429
Date:
January, 1996
File:
PDF, 1.55 MB
english, 1996