Evaluation of Applied Materials' Rapid Thermal Processor using Sematech Methodologies for 0.25 m Technology Thermal Applications-Part II
Nanda, Arun K., Riley, Terrence J., Miner, Gary, Pas, Michael F., Hossain-Pas, SylviaVolume:
429
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-429-23
Date:
January, 1996
File:
PDF, 462 KB
english, 1996