Study of Nitrogen Incorporation in Gate Oxides Using the...

MRS Proceedings 1996 / 1 Vol. 429

Study of Nitrogen Incorporation in Gate Oxides Using the Resistance to Oxidation Method

Sagnes, I., Laviale, D., Regache, M., Glowacki, F., Deutschmann, L., Blanchard, B., Martin, F.
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Volume:
429
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-429-251
Date:
January, 1996
File:
PDF, 442 KB
english, 1996
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