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Low Temperature Selective Si Epitaxy Using Si2H6 and Cl2: Investigations into Selectivity Robustness and Epitaxial Film Quality
O'Neil, Patricia A., Violette, Katherine E., Öztürk, Mehmet C., Batchelor, Dale, Maher, Dennis M.Volume:
429
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-429-355
Date:
January, 1996
File:
PDF, 518 KB
english, 1996