Electrode Materials for Ferroelectric Capacitors:...

MRS Proceedings 1996 / 1 Vol. 433

Electrode Materials for Ferroelectric Capacitors: Properties of Reactive DC Sputtered IrO2 Thin Films

Balu, Venkatasubramani, Chen, Tung-Sheng, Jiang, Bo, Kuah, Shao-Hong, Lee, Jack C., Chu, Peir, Jones, Robert E., Zurcher, Peter, Taylor, Deborah J., Gillespie, Sherry
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Volume:
433
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-433-139
Date:
January, 1996
File:
PDF, 1.85 MB
english, 1996
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