The Effect of Ta and N Content on Mechanical Properties of...

MRS Proceedings 1996 / 1 Vol. 436

The Effect of Ta and N Content on Mechanical Properties of DC Magnetron Sputtered fen and Fetan thin films

Deng, Hong, Minor, M. Kevin, Barnard, John A.
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Volume:
436
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-436-195
Date:
January, 1996
File:
PDF, 471 KB
english, 1996
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