Formation of Buried Layers of (SiC)1-x(AINT)x in 6H-SiC...

MRS Proceedings 1996 / 1 Vol. 438

Formation of Buried Layers of (SiC)1-x(AINT)x in 6H-SiC Using Ion-Beam Synthesis

Yankov, R. A., Hatzopoulos, N., Fukarek, W., Voelskow, M., Heera, V., Pezoldt, J., Skorupa, W.
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Volume:
438
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-438-271
Date:
January, 1996
File:
PDF, 374 KB
english, 1996
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