Conductive Tungsten-Based Layers Synthesized by Ion Implantation into 6H-Silicon Carbide
Weishart, H., Schoneich, J., Voelskow, M., Skorupa, W.Volume:
438
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-438-283
Date:
January, 1996
File:
PDF, 385 KB
english, 1996