Plasma Ion Implantation for Flat Panel Displays

MRS Proceedings 1996 / 1 Vol. 438

Plasma Ion Implantation for Flat Panel Displays

Chan, Chung, Qin, Shu, Zhou, Yuanzhong, Liu, Wei, Wu, Shuichi, Vai, Mankuan Michael, Bursuc, Ionel, Shao, Jiqun, Denholm, Stuart
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Volume:
438
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-438-321
Date:
January, 1996
File:
PDF, 824 KB
english, 1996
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