Plasma Doping and Plasma-Less Doping of Semiconductor

MRS Proceedings 1996 / 1 Vol. 438

Plasma Doping and Plasma-Less Doping of Semiconductor

Mizuno, Bunji, Takase, Michihiko, Nakayama, Ichiro, Ogura, Mototsugu
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Volume:
438
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-438-345
Date:
January, 1996
File:
PDF, 257 KB
english, 1996
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