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Investigations of Plasma Immersion Ion Implantation Hydrogenation for Poly-Si Tfts Using an Inductively Coupled Plasma Source
Zhou, Yuanzhong, Qin, Shu, Chan, ChungVolume:
438
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-438-357
Date:
January, 1996
File:
PDF, 387 KB
english, 1996