Investigations of Plasma Immersion Ion Implantation...

Investigations of Plasma Immersion Ion Implantation Hydrogenation for Poly-Si Tfts Using an Inductively Coupled Plasma Source

Zhou, Yuanzhong, Qin, Shu, Chan, Chung
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
438
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-438-357
Date:
January, 1996
File:
PDF, 387 KB
english, 1996
Conversion to is in progress
Conversion to is failed