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Transient Enhanced Diffusion of Dopants in Preamorphised Si Layers
Claverie, A., Bonafos, C., Omri, M., De Mauduit, B., Assayag, G. Ben, Martinez, A., Alquier, D., Mathiot, D.Volume:
439
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-439-11
Date:
January, 1996
File:
PDF, 2.31 MB
english, 1996