Effects of Addition of Heavy Rare-Earth Elements on the...

Effects of Addition of Heavy Rare-Earth Elements on the Structures and Resistivities of Al Thin Films for TFT - LCD Interconnects

Takayama, Shinji, Tsutsui, Naganori, Zhudan, Zheng
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Volume:
441
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-441-107
Date:
January, 1996
File:
PDF, 2.76 MB
english, 1996
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