Effects of Addition of Heavy Rare-Earth Elements on the Structures and Resistivities of Al Thin Films for TFT - LCD Interconnects
Takayama, Shinji, Tsutsui, Naganori, Zhudan, ZhengVolume:
441
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-441-107
Date:
January, 1996
File:
PDF, 2.76 MB
english, 1996