Doping properties of the Ion-Beam-Sputtered SiGe Film

MRS Proceedings 1996 / 1 Vol. 441

Doping properties of the Ion-Beam-Sputtered SiGe Film

Qi, Wen-Jie, Wang, Zhi-Sheng, Gu, Zhi-Guang, Ru, Guo-Ping, Jialig, Guo-Bao, Li, Bing-Zong
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Volume:
441
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-441-289
Date:
January, 1996
File:
PDF, 213 KB
english, 1996
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