Stress of Platinum Thin Films Deposited by Dc Magnetron...

MRS Proceedings 1996 / 1 Vol. 441

Stress of Platinum Thin Films Deposited by Dc Magnetron Sputtering Using Argon/Oxygen Gas Mixture

Kim, Min Hong, Park, Tae-Soon, Lee, Dong-Su, Lee, Yong Eui, Park, Dong-Yeon, Woo, Hyun-Jung, Chun, Dong-Il, Yoon, Euijoon, Ha, Jowoong
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Volume:
441
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-441-427
Date:
January, 1996
File:
PDF, 280 KB
english, 1996
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