Characterization Of Grown-In Defects In CZ-SI Crystals By...

MRS Proceedings 1996 / 1 Vol. 442

Characterization Of Grown-In Defects In CZ-SI Crystals By Bright Field IR Laser Interferometer

Nakai, Katsuhiko, Hasebe, Masami, Iwasaki, Toshio, Tsumori, Yasuo
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Volume:
442
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-442-113
Date:
January, 1996
File:
PDF, 478 KB
english, 1996
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