Effect of Stresses on Defect Nucleation in Si1−.xGex/Si Heteroepitaxial Systems
Ozkan, Cengiz S., Nix, William D., Gao, HuajianVolume:
442
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-442-373
Date:
January, 1996
File:
PDF, 2.57 MB
english, 1996