Toughened, Inorganic-Organic Hybrid Materials for Microelectronic Application
Hedrick, J. L., Srinivasan, S., Cha, H.-J., Yoon, D., Flores, V., Harbison, M., Pietro, R. Di, Hinsberg, W., Deline, V., Brown, H. R., Sherwood, M., Paulson, E., Miller, R. D., Cook, R., Liniger, E.,Volume:
443
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-443-47
Date:
January, 1996
File:
PDF, 3.12 MB
english, 1996