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Mechanical and Dielectric Properties of Low Permittivity Dielectric Materials
Alptekin, A., Czeremuszkin, G., Martinu, L., Meunier, M., Sacher, E., DiRenzo, M.Volume:
443
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-443-79
Date:
January, 1996
File:
PDF, 941 KB
english, 1996