Comparison of Gate Oxide Processing Techniques for Thin...

MRS Proceedings 1996 / 1 Vol. 446

Comparison of Gate Oxide Processing Techniques for Thin Dielectric Films

Schay, Pat, Lin, Fuyu, Ajuria, Sergio, Stih, John
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
446
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-446-41
Date:
January, 1996
File:
PDF, 736 KB
english, 1996
Conversion to is in progress
Conversion to is failed