Metrology of Very Thin Silicon Epitaxial Films using...

MRS Proceedings 1996 / 1 Vol. 448

Metrology of Very Thin Silicon Epitaxial Films using Spectroscopic Ellipsometry

Chen, Weize, Reif, Rafael
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Volume:
448
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-448-493
Date:
January, 1996
File:
PDF, 286 KB
english, 1996
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