Changes in Optical Transmittance of Aluminum Nitride thin Films Exposed to Air
Sakuragi, Yoshifumi, Watanabe, Yoshihisa, Nakamura, Yoshikazu, Amamoto, YoshikiVolume:
449
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-449-811
Date:
January, 1996
File:
PDF, 840 KB
english, 1996