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An Optical Waveguide Formed by Aluminum Nitride thin film on Sapphire
Tang, Xiao, Yuan, Yifang, Wongchotigul, K., Spencer, Michael G.Volume:
449
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-449-817
Date:
January, 1996
File:
PDF, 265 KB
english, 1996