1-3 MeV B+ and P+ Implants for C-Mos Technology

MRS Proceedings 1985 / 1 Vol. 45

1-3 MeV B+ and P+ Implants for C-Mos Technology

Pontcharra, J. De, Spinelli, P., Bruel, M.
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Volume:
45
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-45-115
Date:
January, 1985
File:
PDF, 403 KB
english, 1985
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