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Dose Measurements on Micro- and Submicrometer Implanted Structures using Thermal-Waves
Smith, W. Lee, Reuss, Robert H., Clark, William, Rensch, DavidVolume:
45
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-45-247
Date:
January, 1985
File:
PDF, 320 KB
english, 1985