The Kinetics and Microstructure of Ion Beam Induced...

MRS Proceedings 1985 / 1 Vol. 45

The Kinetics and Microstructure of Ion Beam Induced Crystallisation of Silicon

Williams, J.S., Brown, W.L., Elliman, R. G., Knoell, R. V., Maher, D.M., Seidel, T.E.
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Volume:
45
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-45-79
Date:
January, 1985
File:
PDF, 2.80 MB
english, 1985
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