Structural Characterization of Dynamic Annealing Effects of...

MRS Proceedings 1985 / 1 Vol. 45

Structural Characterization of Dynamic Annealing Effects of P+ Implanted SI

Berti, Marina, Drigo, A.V., Gabilli, E., Lotti, R., Lulli, G., Merli, P.G., Antisari, M. Vittori
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Volume:
45
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-45-97
Date:
January, 1985
File:
PDF, 1.64 MB
english, 1985
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