Laser Irradiation Effect on Saw Properties of Layered...

MRS Proceedings 1996 / 1 Vol. 459

Laser Irradiation Effect on Saw Properties of Layered Structure of Oxide/Piezoelectric Substrate

Ichikawa, Yo, Kitagawa, Masatoshi, Setsune, Kentaro, Kawashima, Syun-ichiro
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Volume:
459
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-459-237
Date:
January, 1996
File:
PDF, 872 KB
english, 1996
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