Combination of Different Methods to Characterize Micromechanical Sensors
Buchhold, R., Büttner, U., Nakladal, A., Sager, K., Hack, E., Brönnimann, R., Sennhauser, U., Schroth, A.Volume:
459
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-459-243
Date:
January, 1996
File:
PDF, 1.10 MB
english, 1996