Application of Porous Silicon to Bulk Silicon...

MRS Proceedings 1996 / 1 Vol. 459

Application of Porous Silicon to Bulk Silicon Micromachining

Kaltsas, G., Nassiopoulos, A. G.
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Volume:
459
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-459-249
Date:
January, 1996
File:
PDF, 2.16 MB
english, 1996
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