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Electronic Properties and Device Applications of Hot-Wire CVD Polycrystalline Silicon Films
Middya, A. R., Guillet, J., Brenot, R., Perrin, J., Bouree, J. E., Longeaud, C., Kleider, J. P.Volume:
467
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-467-271
Date:
January, 1997
File:
PDF, 715 KB
english, 1997