Growth of Micro-Crystalline SI:H and (SI,GE):H on Polyimide...

MRS Proceedings 1997 / 1 Vol. 467

Growth of Micro-Crystalline SI:H and (SI,GE):H on Polyimide Substrates using ECR Deposition Techniques

Erickson, Karl, Dalal, Vikram L., Chumanov, George
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Volume:
467
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-467-409
Date:
January, 1997
File:
PDF, 266 KB
english, 1997
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