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High-Rate Deposition of a-Si:H Films in 55 kHz Glow Discharge: Growth Mechanisms and Film Structure
Budaguan, B. G., Aivazov, A. A., Sazonov, A. YU, Popov, A. A., Berdnikov, A. E.Volume:
467
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-467-585
Date:
January, 1997
File:
PDF, 1.09 MB
english, 1997