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Ion Bombardment in Silane VHF Deposition Plasmas
Hamers, E. A. G., Bezemer, J., Meiling, H., Van Sark, W.G.J.H.M., Van Der Weg, W. F.Volume:
467
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-467-603
Date:
January, 1997
File:
PDF, 393 KB
english, 1997