Ion Bombardment in Silane VHF Deposition Plasmas

MRS Proceedings 1997 / 1 Vol. 467

Hamers, E. A. G., Bezemer, J., Meiling, H., Van Sark, W.G.J.H.M., Van Der Weg, W. F.

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Volume:

467

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-467-603

Date:

January, 1997

File:

PDF, 393 KB

english, 1997

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