Boron Gettering by Fluorine in Ion Implanted Silicon

MRS Proceedings 1997 / 1 Vol. 469

Krasnobaev, L.Ya., Cuomo, J. J., Vyletalina, O. I.

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Volume:

469

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-469-499

Date:

January, 1997

File:

PDF, 299 KB

english, 1997

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