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Boron Gettering by Fluorine in Ion Implanted Silicon
Krasnobaev, L.Ya., Cuomo, J. J., Vyletalina, O. I.Volume:
469
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-469-499
Date:
January, 1997
File:
PDF, 299 KB
english, 1997