Kinetics of Pt Silicide Formation Studied by Spectral...

MRS Proceedings 1997 / 1 Vol. 470

Kinetics of Pt Silicide Formation Studied by Spectral Ellipsometry

Schwarz, R., Dittrich, A., Zhou, S. M., Hundhausen, M., Ley, L., Chen, L. Y., Woerle, D., Manke, C., Schulz, M.

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Volume:

470

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-470-259

Date:

January, 1997

File:

PDF, 336 KB

english, 1997

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