Laser-Assisted TiSi2 Formation for ULSI Applications

MRS Proceedings 1997 / 1 Vol. 470

Laser-Assisted TiSi2 Formation for ULSI Applications

Shamma, Nader, Talwar, Somit, Verma, Gaurav, Kramer, Karl-Josef, Farrar, Nigel, Chi, Chiu, Greene, Wayne, Weiner, Kurt
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Volume:
470
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-470-265
Date:
January, 1997
File:
PDF, 1.72 MB
english, 1997
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