Deposition of Precursor Poly - Silicon Films for Flat Panel...

MRS Proceedings 1997 / 1 Vol. 471

Deposition of Precursor Poly - Silicon Films for Flat Panel Display Applications

Pethe, R., Deshpandey, C., Dixit, S., Demaray, E., Meakin, D., Orgill, D., Turner, N.
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Volume:
471
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-471-3
Date:
January, 1997
File:
PDF, 793 KB
english, 1997
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