Turnover of Texture in low rate Sputter-Deposited...

MRS Proceedings 1997 / 1 Vol. 472

Turnover of Texture in low rate Sputter-Deposited Nanocrystalline Molybdenum Films

Drüsedau, Tilo P., Klabunde, Frank, Lohmann, Mirko, Hempel, Thomas, Bläsing, Jurgen
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Volume:
472
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-472-33
Date:
January, 1997
File:
PDF, 3.76 MB
english, 1997
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